SiC Wafer Boat for Epitaxy with Plasma Resistance
URL slug: sic-wafer-boat-plasma-resistance
Product Summary
This SiC wafer boat is specifically designed for epitaxy processes involving aggressive fluorine/chlorine plasma. The high-density CVD coating provides outstanding resistance to plasma bombardment, ensuring no coating peeling under rapid thermal cycling.
Key Selling Points
- Outstanding resistance to fluorine/chlorine plasma reduces erosion and extends service life.
- Zero coating peeling under rapid thermal cycling maintains process stability.
- High-density CVD coating ensures low particle generation and high purity.
- Operates up to 1600°C with zero deformation, supporting demanding epitaxy conditions.
Technical Specifications
| Parameter | Value |
|---|
| Material Substrate | SiSiC or RSiC |
| Coating | High-density CVD SiC |
| Max Working Temp | Up to 1600°C |
| Plasma Resistance | Outstanding to F/Cl |
| Thermal Shock | Excellent (1000°C to RT) |
Models and Options
Model: SiC-01. Options: substrate type (SiSiC/RSiC), custom size, coating thickness.
Materials and Structure
High-density CVD SiC coating on SiSiC/RSiC substrate. Structure robust enough for high-load batch processing.
Applications
Epitaxy processes, especially those involving plasma etching or cleaning steps.
Customization
Custom dimensions and coating specifications available.
Case Study
In South Korea, a customer used 500 units per month for epitaxy. Achieved stable mass production with consistent epitaxial layer quality, reduced edge ring replacement frequency by 20%.
FAQ
Q1: How does it resist plasma attack?
A: High-density CVD coating provides a tough barrier against F/Cl plasma.
Q2: Does it peel under thermal cycling?
A: No, zero coating peeling under rapid thermal cycling.
Q3: What substrate materials are available?
A: Both SiSiC and RSiC are available.
Q4: What is the temperature limit?
A: Up to 1600°C.
Q5: Can it be used in other high-temp processes?
A: Yes, it is suitable for diffusion and oxidation as well.
Q6: What is the MOQ?
A: 1 unit.
Inquiry Information
Contact: Frank, sales05@semi-cera.com, +86 15957878134. MOQ: 1 unit. Delivery terms and payment as per company policy.
Product Image
Image filename: sic-wafer-boat-plasma-resistance.png. Alt text: SiC wafer boat with plasma resistance for epitaxy.
