SiSiC Wafer Boat with CVD SiC Coating for Diffusion Furnaces
URL slug: sisi-wafer-boat-cvd-coating
Product Summary
This SiSiC wafer boat is engineered for demanding diffusion and oxidation processes. Made from sintered silicon carbide with a dense CVD SiC coating, it operates up to 1600°C with zero structural deformation. It offers over 5 times longer service life compared to traditional quartz boats, ensuring reliable high-temperature performance in semiconductor fabs.
Key Selling Points
- SiSiC substrate with CVD SiC coating provides high density and purity, reducing particle contamination and maintaining process integrity.
- Thermal shock resistance enables repeated cycling from 1000°C to room temperature, minimizing cracking risks and extending lifespan.
- Zero deformation up to 1600°C ensures consistent wafer positioning and uniform process results.
- Over 5x longer lifespan than quartz boats reduces replacement frequency and operational costs.
Technical Specifications
| Parameter | Value |
|---|
| Material Substrate | SiSiC (Sintered SiC) |
| Coating | CVD SiC |
| Max Working Temp | Up to 1600°C |
| Service Lifespan | >5x longer than quartz boats |
| Thermal Shock | Excellent (1000°C to RT cycles) |
Models and Options
Model: SiC-01. Options: Recrystallized (RSiC) or Sintered (SiSiC) substrate, custom dimensions, coating thickness.
Materials and Structure
Substrate: SiSiC ceramic. Coating: high-density CVD SiC. Structure designed for high-load batch wafer carrier in vertical/horizontal diffusion furnaces.
Applications
Oxidation and diffusion processes in semiconductor device manufacturing, suitable for high-temperature LPCVD and corrosive gas environments above 1200°C.
Customization
Dimensions, slot spacing, and coating specifications can be customized to fit customer furnaces and process requirements.
Case Study
In North America, a customer used 900 units per month for epitaxy processes. Over 2 years, consistent epitaxial uniformity was achieved and equipment maintenance downtime was reduced by 15%.
FAQ
Q1: What is the maximum operating temperature?
A: Up to 1600°C with zero structural deformation.
Q2: How does it compare with quartz boats?
A: Service lifespan is over 5 times longer, reducing replacement frequency.
Q3: Can it withstand rapid temperature changes?
A: Yes, it has excellent thermal shock resistance, tested from 1000°C to room temperature cycles.
Q4: What materials are used?
A: SiSiC substrate with CVD SiC coating.
Q5: Is it suitable for LPCVD processes?
A: Yes, it is used in high-temperature LPCVD environments with corrosive gases.
Q6: What is the MOQ?
A: 1 unit.
Q7: Can I get custom dimensions?
A: Yes, custom dimensions are available.
Inquiry Information
Contact: Frank, Email: sales05@semi-cera.com, Tel/WhatsApp: +86 15957878134. MOQ: 1 unit, Delivery: EXW/FCA/DAP/DDP, Payment: 100% T/T in advance for new customers; 70% T/T in advance, 30% before shipment for long-term partners.
Product Image
Image filename: sic-wafer-boat-sic-01-cvd-coating.png. Alt text: SiC wafer boat with CVD coating for diffusion process.
