Ultra-High Purity Quartz Wafer Boat GE214 for Diffusion Furnaces
Semicera's ultra-high purity quartz wafer boat, manufactured from GE214 or equivalent fused quartz, delivers thermal stability and chemical purity for demanding oxidation and diffusion processes. With a continuous working temperature of 1150°C and SiO2 content ≥99.99%, this boat ensures minimal contamination and long service life in semiconductor fabrication.
Key Selling Points
Ultra-high purity: SiO2 content ≥99.99% minimizes wafer contamination, enhancing yield.High-temperature durability: Continuous operation up to 1150°C, short-term up to 1300°C, with low thermal expansion.Precise slot pitch: Tolerance ≤ ±0.05 mm ensures accurate wafer positioning.Material reliability: GE214 fused quartz provides excellent chemical stability in oxidation environments.
Technical Specifications
Material Grade GE214 or equivalent ultra-high purity fused quartz Max Working Temperature Continuous 1150°C, Short-term 1300°C Slot Pitch Tolerance ≤ ±0.05 mm SiO2 Content ≥ 99.99% Type Diffusion/Oxidation Batch Wafer Carrier (Horizontal or Vertical)
Models and Options
Standard configuration as specified, custom slot counts and dimensions available upon request.
Materials and Structure
Ultra-high purity fused quartz, engineered for minimal thermal expansion and high chemical resistance.
Applications
Oxidation/diffusion process in semiconductor device manufacturing (fab), batch processing at 800-1100°C atmospheric.
Customization
We offer custom slot pitch, length, and configuration to match your furnace and wafer size.
FAQ
1. What is the maximum operating temperature?
Continuous 1150°C, short-term up to 1300°C.
2. What are the slot pitch tolerances?
≤ ±0.05 mm.
3. Is the quartz material high purity?
Yes, SiO2 content ≥99.99%.
4. Can I get custom dimensions?
Yes, customization is available.
5. What are the shipping terms?
EXW, FCA, DAP, DDP.
6. What is the MOQ?
1 unit.
7. How is payment handled?
New customers 100% T/T in advance; long-term customers 70% T/T in advance, 30% before shipment.
8. Do you have any certifications?
Yes, ISO9001, ISO14001, ISO45001.
Inquiry Information
For more details or to request a quote, contact:
Image Filename and Alt Suggestions
Main image: High-Purity-Quartz-Crystal-Boat.jpg
